Drop Shape Analysis System DSA100W

DSA100W

Automatic determination of contact angle and surface free energy on wafer

The DSA100W, the so-called wafer tester, is the optimal configuration for the automatic measurement of flat, round samples such as silicon wafers. With its built-in surface-mapping module the whole surface of up to a 12” wafer can be characterized. The determination of contact angles and surface free energy forms part of the combination.

Configuration of the DSA100W

Dosing

Software controlled single dosing system

Camera

Standard camera
61 fps (780×580 px) respectively
311 fps (780×60 px)

Optics

Manual zoom / focus

Illumination

Software controlled 

Axis

Software controlled z-axis
Software controlled x/y-axis with 170 mm movement range

Stage

Software controlled 300 mm wafer table

Software

Software to determine static and dynamic contact angles
Software to determine surface free energy of solids

Technical Data of the DSA100W

Max. sample size (WxDxH)

300 x ∞ x 150 mm
(500 x ∞ x 150 mm for the long frame version)

Dimension of sample (LxW)

105 x 105 mm (Ø 300 mm)
(500 x 500 mm for the long frame version)

Range of
contact angle
measurements *

  • 0 to 180°
  • 0.1° resolution

Range of
surface tension
measurements

  • 1x10-2 to 1000mN/m
  • 0.01mN/m resolution

Optics

  • 7-fold zoom
  • FOV 4 -28.13 mm diagonal
  • Stray light compensation
  • Integrated focus module
  • High-performance-vario-field ilumination
  • Viewing angle alignment without shift of image
  • Patented construction of the optics

Video systems

  • 61 fps (780×580 px), 311 fps (780×60 px)  
  • 1000 fps optional 
  • Online max. 100 evaluations / second
  • Video sequences (duration depending on RAM)
  • Automatic software trigger for evaluation / recording

Software 

5 different methods of drop shape analysis for Sessile Drop, automatic baseline for contact angle between 0 to 180°, option for curved baseline, Pendant Drop Method, video sequence, procedure definition, autodrop delivery, calculation of surface free energy according to Fowkes, extended Fowkes, Wu, Zisman, Owens-Wendt-Rabel, van Oss & Good, Neumann, calculation of Wetting envelopes, etc…

Temperature range

-60 to 400°C

Dimensions (WxDxH)

620 × 380 × 610mm (954 x 380 x 610 mm for the long frame version)

Weight

25 to 45 kg

Power supply

110 to 240 VAC

Interfaces

Optional connection to USB port of PC via adapter

* Referring to image analysis